发明名称 |
METHOD FOR MANUFACTURING ELECTROSTATIC ATTRACTION TYPE LIQUID DISCHARGE HEAD, METHOD FOR MANUFACTURING NOZZLE PLATE. |
摘要 |
First, through a coating step, a photolithography step and an etching step, a plurality of electrodes 142, 142, ... are formed on a base plate 141. Next, a resist layer 143b is formed on the base plate 141 so as to cover all of the electrodes 142, 142, ..., and by exposing and developing the resist layer 143b, a nozzle 103 having a super minute diameter is formed to stand with respect to the base plate 141 so as to make the resist layer 143b correspond to each electrode 142, and an in-nozzle passage is formed in each nozzle 103. <IMAGE>
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申请公布号 |
EP1550556(A1) |
申请公布日期 |
2005.07.06 |
申请号 |
EP20030798450 |
申请日期 |
2003.09.22 |
申请人 |
KONICA MINOLTA HOLDINGS, INC.;SHARP KABUSHIKI KAISHA;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE |
发明人 |
NISHI, YASUO;HIGUCHI, KAORU;MURATA, KAZUHIRO;YOKOYAMA, HIROSHI |
分类号 |
B05B5/025;B05B17/06;B41J2/06;B41J2/14;B41J2/16;(IPC1-7):B41J2/06;B41J2/135;B05C5/02 |
主分类号 |
B05B5/025 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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