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摘要
申请公布号
JP3673459(B2)
申请公布日期
2005.07.20
申请号
JP20000300313
申请日期
2000.09.29
申请人
发明人
分类号
B05C11/08;C23F1/08;H01L21/027;H01L21/304;H01L21/306;(IPC1-7):H01L21/306
主分类号
B05C11/08
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