CORIOLIS MASS FLOW CONTROLLER

摘要

A CORIOLIS MASS FLOW SENSOR INCLUDES A FLOW SENSOR TUBE (134,206) AND A DRIVE DEVICE (208) SITUATED RELATIVE TO THE FLOW SENSOR TUBE SO AS TO CAUSE THE FLOW SENSOR TUBE TO VIBRATE. AT LEAST ONE CAPACITIVE PICK OFF SENSOR (210) IS SITUATED RELATIVE TO THE FLOW SENSOR TUBE SO AS TO MEASURE THE TWIST IN THE FLOW SENSOR TUBE DUE TO CORIOLIS FORCE. THE CAPACITIVE PICK OFF SENSOR INCLUDES FIRST AND SECOND CONDUCTIVE PLATES (130) SITUATED NEAR THE FLOW SENSOR TUBE IN A PLANE TANGENTIAL TO THE MOTION OF THE FLOW SENSOR TUBE WHEN THE FLOW SENSOR TUBE IS VIBRATED. MOST ILLUSTRATIVE DRAWING IS (FIGURE 11)