| 摘要 |
PROBLEM TO BE SOLVED: To manufacture piezoelectric actuators for ink-jet heads inexpensively with good yield without carrying out machining. SOLUTION: According to the manufacture of piezoelectric actuators for ink-jet heads, a plurality of mold holes 50 are opened in a photoresist layer 44 layered on a substrate 18, and a piezoelectric slurry 52 is filled in the mold holes 50, which is then baked. The photoresist layer 44 is burnt off. A piezoelectric member 56 left on the substrate 18 is polarized, whereby actuators 22 are obtained. |
