| 摘要 |
PROBLEM TO BE SOLVED: To provide a long-life inspecting tool for semiconductor device characteristics. SOLUTION: The tool 1 for inspecting semiconductor device characteristics is constituted of a circuit board 2 and an electrode adapter 3 detachable from the board. The electrode adapter 3 includes a light-output-current-voltage characteristics (LIV characteristics) measuring electrode part 3b and a burn-in electrode part 3a. When the adapter 3 is mounted on the circuit board 2, the electrode parts 3a and 3b of the adapter 3 are conductive with each semiconductor laser 4 mounted on a socket 2a of the board 2. When inspecting the characteristics, a connection pin of a LIV characteristics measuring device is pushed against a connection surface of the electrode part 3b for the LIV characteristics measuring for making electric connection, the LIV characteristics of the semiconductor laser 4 are measured, the tool 1 is inserted into a burn-in oven, and the electrode part 3a is inserted into the socket for a burn-in process. Then the LIV characteristics are again measured by the LIV characteristics measuring device. When the electrode parts 3a and 3b deteriorate, only the electrode adapter 3 is replaced. COPYRIGHT: (C)2008,JPO&INPIT
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