DOUBLE-FACE COATING APPARATUS, AND COATING-LIQUID DOUBLE-FACE COATING METHOD

摘要

Provided is a coating apparatus, which can apply a coating liquid homogeneously to the two faces of a treated substrate having a center opening, by a simple process while preventing the coating liquid from intruding into the center opening. The coating apparatus (1) applies the coating liquid to both the main faces of a treated substrate (2) having a center opening (2a). The coating apparatus (1) comprises a rotating drive mechanism (3) having a chucking unit (11) for holding the treated substrate (2) while closing the center opening (2a), a first liquid applying nozzle (18) for injecting the coating liquid to one main face of the treated substrate (2), a first turning drive mechanism (17) for moving and operating to scan the first liquid applying nozzle (18) along the main face of the treated substrate (2), a second liquid applying nozzle (28) for injecting the coating liquid to the other main face of the treated substrate (2), and a second turning drive mechanism (31) for moving and operating to scan the second liquid applying nozzle (28) along the other main face of the treated substrate (2). The coating apparatus (1) has a function to control the injection rate of the coating liquid in a first coating-liquid injecting port (23) and the injection rate of the coating liquid in a second coating-liquid injecting port (29) independently.