| 摘要 |
PROBLEM TO BE SOLVED: To achieve various methods and systems for using design data in combination with inspection data.SOLUTION: A one-computer implementation method for determining the position of inspection data in a design data space includes aligning data taken in by an inspection system for an alignment site on a wafer with data for a predetermined alignment site. This method further includes determining the position of the alignment site on the wafer in the design data space on the basis of the position of the predetermined alignment site in the design data space. Additionally, this method includes determining the position of the inspection data taken in about the wafer by the inspection system in the design data space on the basis of the position of the alignment site on the wafer in the design data space. In one embodiment, the position of the inspection data is determined with sub-pixel accuracy.SELECTED DRAWING: Figure 1 |
