| 摘要 |
Materials, components, and methods consistent with the disclosure are directed to the fabrication and use of micro scale channels with a gas, where the micro channel can include a base (110) and a side (120), where the base and the side can be configured to form at least a portion of an inflow opening, and an outflow opening. The micro channel can be configured to accommodate a flow of the gas from the inflow opening to the outflow opening in a first direction substantially perpendicular to a cross section of the micro channel. The side can have a thickness in a range 0.5 μm and 500 μm, where the micro channel with a thickness in a range 0.5 μm and 500 μm is formed, in part, by providing the side on the base. |
