SCRIBE LINE FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a beautifully divided surface of a substrate while minimizing damage to a surface of the substrate using a normal wheel.SOLUTION: A scribe line forming method for forming a scribe line on a top surface of a substrate to divide the substrate uses the normal wheel to form a scribe line by advancing the wheel forward so that a plastic deformation depth at the surface of the substrate formed by the wheel is made intermittently to be deep and shallow.SELECTED DRAWING: Figure 1