| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine solid electrolytic thin film which has high crystallization property, thermal stability and high conductivity of oxygen ion, and a manufacturing method in which it can be produced in a short time. SOLUTION: In this method, electrolyte material 8 is heated and evaporated by irradiating with high density arc discharge plasma current 13, at the same time, the evaporated particles are made plasmatic, and an electrolytic thin film is formed by supplying the evaporated particles which are made plasmatic onto a porous electrode base plate 12 for a flat and thin film fuel cell. At this time, the electrolyte material 8 contains 6-12wt.% of metal yttrium in zirconium monoxide (ZrO) with electric conductivity under the room temperature, and oxide thin film, which is composed of 5-14mol% of yttrium oxide and 86-95mol% of zirconium oxide, is formed on the porous electrode base plate 12 under an oxygen atmosphere. |
