| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing equipment capable of restricting a dispersion in a gas evacuating speed and improving a uniformity in a clean air flow. SOLUTION: An air volume flow regulating plate 41 is arranged at an upstream side of an air discharging fan 38 for use in discharging clean air flowing in a casing to cause a clean air flow to be sucked into a discharging fan 38 through an air volume flow regulating plate 41, so that a pressure difference between a discharging fan and another discharging fan is eliminated, a negative pressure at a suction side of each of the discharging fans is made uniform, a flow of air from the air volume flow regulating plate 41 toward the air discharging fan is made uniform, and thereby an air discharging amount and an air discharging speed can be made uniform. |
