摘要 |
PURPOSE:To prevent an x-ray transmission film from being abnormally heated at the time of sputter film forming and to stably form a desirable x-ray mask by disposing the x-ray transmission film in a reactor and cooling means for cooling it through a gap, and introducing sputtering gas to a gap between the film and the cooling means to cool the film. CONSTITUTION:When an x-ray absorber is sputter formed on an x-ray transmission film 41, the film 41 in a reactor 21 having discharging electrodes and a target 25 and cooling means 26 for cooling the film 41 are disposed through a gap, and sputtering gas is introduced to a gap 32 between the film 41 and the means 26. Thus, pressure in the gap 32 can be raised several mmTorr to several Torr as compared with that of a conventional method, thermal conduction in the gap 32 can be increased, and the heat of the film 41 can be escaped to a water-cooled holder 26. Thus, it can prevent the film 41 from being abnormally heated at the tine of sputter film forming, the film 41 can be cooled, and a desirable x-ray mask can be stably formed. |