| 摘要 |
PROBLEM TO BE SOLVED: To prevent a rotational blade from becoming to high temperature abnormally and products from depositing, and to improve achievement pressure during baking, and alarm performance of the rotational blade, and exhaust performance, by providing a rotational-blade temperature detecting means which measures or presumes temperature of the rotational blade. SOLUTION: A turbo-molecular pump P is constituted so as to provide momentum to gas molecules which collide with a rotational blade to carry gas, and a rotational blade temperature sensor 1, which faces the bottom of the rotational blade, for example, of this pump P and consists of a radiation thermometer, is placed on the base. During operating of the turbo-molecular pump P, temperature of the rotational blade which is indirectly detected with the rotational blade temperature sensor 1 is input into a rotational frequency judging device 5 for the motor driver output setting. When difference between the temperature and a preset thermal values is within a prescribed temperature range, a transfer switch 9 is connected to a driver output adjusting device 10 and the output is adjusted according to the difference. When the difference is out of the prescribed temperature range, the transfer switch 9 is connected to a brake and a stopping signal is sent to a motor driver 8 to stop a motor M. |
