Radiation-sensitive mixture, and recording material produced therewith

摘要

The invention relates to a radiation-sensitive mixture containing a) a binder which is insoluble in water, but is soluble, at least swellable, in aqueous-alkaline solution, b) a compound which forms a strong acid on exposure to actinic radiation, and c) either, for a positive-working mixture, a compound which contains at least one C-O-C or C-O-Si bond which can be cleaved by this acid or, for a negative-working mixture, a compound containing at least two acid-crosslinkable groups, which is characterised in that it additionally contains from 0.01 to 20 % by weight, based on the total weight of compounds a), b) and c), of an additive of the formula I <IMAGE> . The invention furthermore relates to a recording material comprising a support (carrier, substrate, base) and a radiation-sensitive coating. The mixture can be used in the production of electronic components, in particular integrated circuits.