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经营范围
发明名称
ION BEAM DEVICE
摘要
申请公布号
JPH09180662(A)
申请公布日期
1997.07.11
申请号
JP19950340297
申请日期
1995.12.27
申请人
HITACHI LTD
发明人
TOKIKUCHI KATSUMI;AMAMIYA KENSUKE;ITO JUNYA;SEKI TAKAYOSHI
分类号
H01J27/16;H01J37/05;H01J37/08;H01J37/317;(IPC1-7):H01J37/05
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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