| 摘要 |
PROBLEM TO BE SOLVED: To enhance machining speed by enabling one fθlens to be used simultaneously and dividedly with plural sets of galvano-scanner. SOLUTION: This machining device branches a laser beam into plural channels through one or more half mirrors 11. The branched laser beams are each guided to multiple galvano-scanner systems arranged in positions on the incident side of an fθlens 15 as a machining lens; the laser beams distributed by the multiple galvano-scanner systems are each emitted to plural fields F1, F2 that are dividedly set in the machining area through the fθlens 15. |
