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发明名称
CIRCUITRY AND METHOD FOR AN ELECTROPLATING PLANT OR ETCHING PLANT PULSE POWER SUPPLY
摘要
申请公布号
EP0966557(A1)
申请公布日期
1999.12.29
申请号
EP19980910610
申请日期
1998.02.02
申请人
ATOTECH DEUTSCHLAND GMBH
发明人
MAURER, MANFRED
分类号
C25D5/18;C25D21/00;C25D21/12;C25F7/00;H05K3/24;(IPC1-7):C25F7/00
主分类号
C25D5/18
代理机构
代理人
主权项
地址
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