METHOD FOR MEASURING STEPS OF SEMICONDUCTOR DEVICE AND EQUIPMENT FOR MEASURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a step of a semiconductor device and an equipment for measuring the same. SOLUTION: A first light is condensed on a wafer W and is adjusted so that a focal point is positioned on a first point of the wafer surface, subsequently a second-light is condensed on the wafer W and is adjusted so that the focal point is positioned on a second point. A vertical moving distance of the wafer W and a first lens 34b being a condensing equipment to focus on the first and second points is calculated and the step between the first point and the second point is measured. Therefore, it is possible to measure the step without directly contacting the semiconductor device in measuring the step of the semiconductor device.