发明名称 SILICON-ON-INSULATOR (SOI) JUNCTION FIELD EFFECT TRANSISTOR AND METHOD OF MANUFACTURE
摘要 A semiconductor device including complementary junction field effect tran sistors (JFETs) manufactured on a silicon on insulator (SOI) wafer is disclo sed. A p- type JFET includes a control gate (170) formed from n-type polysil icon and an n-type JFET includes a control gate (110) formed from .rho.-type polysilicon. The complementary JFETs may include four terminal JFETs having a back gate formed below a channel region. The back gate may be electricall y connected to a control gate formed above a channel region via a cut region in an isolation structure. Furthermore, the complementary JFETs may be form ed on strained silicon formed on a silicon germanium (SiGe) or silicon germa nium carbon (SiGeC) layer, or the like.
申请公布号 CA2660885(A1) 申请公布日期 2008.02.28
申请号 CA20072660885 申请日期 2007.08.15
申请人 DSM SOLUTIONS, INC. 发明人 KAPOOR, ASHOK K.
分类号 H01L27/098 主分类号 H01L27/098
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