发明名称 STABILIZER FOR ACIDIC, METAL-CONTAINING POLISHING BATHS
摘要 The present invention relates to the use of a mixture of urea and one or more alkane-diphosphonic acids, optionally substituted with one or more hydroxyl or amino groups, or salts thereof for the stabilization of an acidic, metal- and peroxide-containing polishing solution. The invention also relates to peroxide-containing solutions that are suitable for the stabilization of acidic, metal- and peroxide-containing polishing baths, and acidic, peroxide-containing polishing solutions that contain the stabilizer mixture according to the invention. A method of chemical polishing of metal surfaces using the stabilizer according to the invention is also described.
申请公布号 US2008067149(A1) 申请公布日期 2008.03.20
申请号 US20070857564 申请日期 2007.09.19
申请人 POLIGRAT GMBH 发明人 PIESSLINGER-SCHWEIGER SIEGFRIED;BOHME OLAF
分类号 C23F3/00;C09K13/04 主分类号 C23F3/00
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