发明名称 |
Halbleiterdrucksensor mit Dehnungsmeßstreifen und Spannungsausgleichsfilm |
摘要 |
In a semiconductor pressure sensor having a diaphragm portion and strain gauges on the diaphragm portion, Al stress balance films are provided around the diaphragm portion to balance changes in stress of the strain gauges, which are produced by a change in temperature. As a result, sensor output is prevented from varying due to the change in temperature. |
申请公布号 |
DE19924061(B4) |
申请公布日期 |
2009.06.18 |
申请号 |
DE1999124061 |
申请日期 |
1999.05.26 |
申请人 |
DENSO CORPORATION |
发明人 |
TANAKA, HIROAKI;TOYODA, INAO;SUZUKI, YASUTOSHI |
分类号 |
B81B3/00;G01L9/04;G01L9/00;G01L19/06;H01L27/20;H01L29/84 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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