MEMS DEVICES REQUIRING NO MECHANICAL SUPPORT

摘要

MEMS devices such as interferometric modulators are described having movable layers (14a, 14b) that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top (16a) and bottom electrode (17a) through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.