| 摘要 |
PROBLEM TO BE SOLVED: To obtain a rotor for a vacuum pump which is easily and inexpensively produced, and excellent in corrosion resistance, by forming on a rotor a corrosion resistant protection coating layer of high polymer material of even thickness. SOLUTION: A rotor of a turbo-molecular pump has a plurality of flat rotor discs 2 and a plurality of rotor discs 3 each having a projected and tapered blade 4. The surface of the rotor is coated with a high polymer protection coating layer 6 evenly distributed over the rotor. The high polymer material is preferably straight chain organic compound having molecular weight of 10,000 or more, provided with electric insulation. The coating layer 6 is obtained by copolymer of reactive monomer all over the surface of the rotor under a vacuum condition. The high polymer material of the coating layer 6 is preferably poly-(p-xylene), which is polymer of (p-xylene). The thus treated rotor shows durability against corrosion more excellent than a conventional one. |
