Methods and devices configured to provide selective heat transfer of an integrated circuit

摘要

Methods and devices configured to provide selective heat transfer of a temperature-sensitive circuit are provided. In an example, a device comprises a thinned base substrate including an integrated circuit (e.g., back side illuminated (BSI) image sensor comprising a detector array area and a peripheral circuitry area). The device also comprises a supporting substrate comprising one or more thermoelectric structures. The supporting substrate may be coupled to the base substrate such that the one or more thermoelectric structures are aligned with the detector array area, and the thermoelectric structures may be configured to transfer heat away from the detector array area, while a reduced cross-section of a thinned base substrate may be configured to substantially reduce lateral heat flow across the base substrate and enable selective heat transfer.

主权项

1. A device, comprising:
a base substrate within which an image sensor resides comprising a detector array area and a peripheral circuitry area, wherein the image sensor is arranged on the base substrate such that the detector array area includes a center portion of the base substrate and the peripheral circuitry area encompasses a periphery portion of the base substrate that surrounds one or more sides of the center portion, and wherein the base substrate includes one or more heat isolation trenches that reside within the base substrate between the detector array area and the peripheral circuitry area; and a supporting substrate comprising one or more thermoelectric structures, wherein the one or more thermoelectric structures reside on a center portion of the supporting substrate, and wherein the supporting substrate is coupled to the base substrate such that the one or more thermoelectric structures are aligned with the center portion of the base substrate so as to align with the detector array area, wherein the thermoelectric structures are configured to transfer heat away from the detector array area.