Batch Heating and Cooling Chamber or Loadlock

摘要

Wafer cassettes and methods of use that provide heating a cooling to a plurality of wafers to decrease time between wafer switching in a processing chamber. Wafers are supported on a wafer lift which can move all wafers together or on independent lift pins which can move individual wafers for heating and cooling.

主权项

1. A wafer cassette comprising:
a wall supporting a plurality of cold plates, the wall allowing access to a front side of at least some of the cold plates; a plurality of LED lamps positioned against a back side of the cold plates and having a front side spaced from a front side an adjacent cold plate to form a gap, the plurality of LED lamps directed toward the front side of the adjacent cold plate; and a wafer lift positioned to support a periphery of a wafer.