| 摘要 |
The present invention provides a miniaturization diaphragm vacuum pump which can enhance gas displacement and final vacuum. The diaphragm vacuum pump is formed by the steps as follows: forming a diaphragm vacuum pump unit (11a), stacking the diaphragm vacuum pump units with multiple layers along the up and down directions, connecting adjacent cam shafts of the diaphragm vacuum pump unit mutually in the up and down direction by utilizing a toothed belt (2), and connecting one cam shaft of the diaphragm vacuum pump unit with a motor (12). The diaphragm vacuum pump unit includes: cam shafts, a crankshaft mechanism (13), which works by the rotation of the cam shafts; a connecting member (14), which does a reciprocating motion along the horizontal direction by utilizing the crankshaft mechanism; diaphragms (16,17) which are mounted on two ends of the connecting member; a pair of pump chambers (17,18), wherein, the capacity of the pump chambers enlarges or shrinks by the action of the diaphragms; an air inlet passage and an air outlet passage communicated with the pump chambers; a check valve in the air inlet side; and a check valve in the air outlet side. |
