发明名称 ワイヤソー装置及びワイヤ走行制御方法
摘要 PROBLEM TO BE SOLVED: To accurately perform synchronizing control of a wire guide and a winder in a wire saw device.SOLUTION: A wire saw device 100 performs cutting work by pressing a workpiece W to a cutting wire 103 while running the cutting wire 103 spirally wound around wire guides 102A and 102B. Delivering and winding of the cutting wire 103 are performed by winders 161 and 171. A control means 108 performs synchronizing control of the wire guides 102A and 102B, and winders 161 and 171 based on a difference between the positional deviation of a motor 120A which rotates the wire guides 102A and 102B, and the positional deviation of respective motors 162 and 172 which rotate the winders 161 and 171.
申请公布号 JP5973778(B2) 申请公布日期 2016.08.23
申请号 JP20120106859 申请日期 2012.05.08
申请人 トーヨーエイテック株式会社 发明人 岩井 利光;福万 勝
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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