STERILIZATION METHOD AND APPARATUS USING THE SAME

摘要

A sterilization method and a sterilization apparatus using the sterilization method are provided. The sterilization method includes: forming a low-pressure atmosphere having a pressure lower than atmospheric pressure in a chamber by discharging gas from the chamber using a high-speed blower; primarily supplying an oxidative gas to the chamber maintained at a pressure lower than atmospheric pressure; forming a high-pressure atmosphere having a pressure higher than atmospheric pressure in the chamber by introducing external gas into the chamber using the blower; and secondarily supplying the oxidative gas to the chamber maintained at a pressure higher than atmospheric pressure. Therefore, sterilization may be effectively performed by adjusting the interior pressure of the chamber using the blower without using a vacuum pump. Furthermore, continuous circulation of gas in the chamber that is difficult in case of using a vacuum pump may guarantee effective sterilization, and humidity may easily be adjusted during sterilization.