| 摘要 |
PURPOSE:To obtain ultra-high vacuum without exposing a vacuum container to a high temp., by reducing gas adsorbed in the inner wall of the vacuum container by adequately using an electromagnetic wave. CONSTITUTION:An oscillator 9 is attached to a vacuum container 1 through a wave guide 10 and driven by a power source 11 to supply high frequency power into the vacuum container 1 from the oscillator 9. Whereupon, the substance adsorbed with the inner wall of the container 1 can be removed. By this method, because the vacuum container can be brought to ultra-high vacuum without heating the whole of the container, the handling of a substance having no heat resistance is facilitated. |
