发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To drive a discharge torch independently from a current feeder and facilitate quick wire bonding by a method wherein the current feeder which applies a predetermined voltage to the discharge torch is not contacted with the discharge torch while the discharge is not performed. CONSTITUTION:A feeding electrode 36 to which a lead wire 15 is connected is composed of a spring board and constitutes a cross-bar contact mechanism with the incoming electrode 14a of a discharge torch 14. Therefore, the feeding electrode 36 and the incoming electrode 14a are contacted with each other only when the discharge torch 14 comes to the position of discharge start by the rotation of a holder 13 with a bearing 17 as a center in accordance with the current application to a solenoid coil 20 and a predetermined voltage is applied to a discharge electrode 14b. With this constitution, as the feeding electrode 36 and the incoming electrode 14a are contacted with each other at the time of discharge only, when the discharge torch 14 is rotated, no excessive load is applied to it so that quick operation can be realized.
申请公布号 JPS62249439(A) 申请公布日期 1987.10.30
申请号 JP19860092173 申请日期 1986.04.23
申请人 HITACHI TOKYO ELECTRON CO LTD;HITACHI LTD 发明人 KYOMASU RYUICHI;TAKASUGI NOBUHIRO;ISHII YASUSHI
分类号 H01L21/60 主分类号 H01L21/60
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