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发明名称
Matrix array using MIM device and alpha and beta tantalum electrodes
摘要
申请公布号
US5274482(A)
申请公布日期
1993.12.28
申请号
US19910796248
申请日期
1991.11.21
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
MORITA, HIROSHI;SUNOHARA, KEIKO;NISHIMURA, KAZUNARI
分类号
G02F1/1365;(IPC1-7):G02F1/134;H01L27/02;H01L29/46;H01L29/88
主分类号
G02F1/1365
代理机构
代理人
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地址
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