| 摘要 |
PURPOSE:To realize high flatness polishing work of a polishing object by controlling a nonuniform load on the polishing object by thermal stress, load stress or the like. CONSTITUTION:Plural actuators 7 capable of adjusting pressurizing force independently are arranged under a mount head 3, and a mount plate 2 holding a polishing object 5 is pressed through these pressurizing actuators 7. |
