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发明名称
PART FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07130804(A)
申请公布日期
1995.05.19
申请号
JP19930273611
申请日期
1993.11.01
申请人
HITACHI LTD
发明人
SAITO TOSHIYA
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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