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发明名称
METHOD FOR PATTERNING PLATINUM OR PALLADIUM METALLIC FILM
摘要
申请公布号
JPH07130702(A)
申请公布日期
1995.05.19
申请号
JP19930278657
申请日期
1993.11.08
申请人
FUJITSU LTD
发明人
NOSHIRO HIDEYUKI
分类号
H01L21/302;H01L21/02;H01L21/304;H01L21/306;H01L21/3065;H01L21/314;H01L21/3213;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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