发明名称 X-RAY EVALUATION APPARATUS
摘要 PURPOSE:To make it possible to observe crystal growth, molecule reaction and the like by high-speed scanning at an (ns) unit or a (ps) unit. CONSTITUTION:As an X-ray spectroscope 13, the spectroscope, which has a curved crystal surface 13a and performs spectroscoping and condensation of X rays, is used. The curved-crystal surface 13a of the X-ray spectroscope 13 is arranged so as to cross a sample surface 11a at a right angle. The spectral X rays are cast on the sample surface 11a at the same time. Thus, the high- speed scanning can be performed without using a mechanical rotary mechanism, whose speed is restriced. The X rays, which have undergone spectroscoping with the curved crystal surface 13a, are cast on the sample 11 through a slit 14. Thus, the noise component generated by the illumination of the X rays caused by scattering can be alleviated.
申请公布号 JPH0798286(A) 申请公布日期 1995.04.11
申请号 JP19930242332 申请日期 1993.09.29
申请人 RICOH CO LTD 发明人 KATSURAGAWA TADAO
分类号 G01N23/20 主分类号 G01N23/20
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