发明名称 Vacuum chamber and method of manufacturing the vacuum chamber
摘要 A vacuum chamber according to the present invention has a plurality of plates arranged to be joined together by using bolts to form an internal space, a sealing member continuously disposed along joint lines on the inside portion of the vacuum chamber facing the internal space in order to seal joint portions among the plates, and pressing members secured to the plates by bolts so as to hermetically press the sealing member against the joint portions among the plates.
申请公布号 US5853176(A) 申请公布日期 1998.12.29
申请号 US19970791285 申请日期 1997.01.30
申请人 TOKYO ELECTRON LIMITED 发明人 KIRIYAMA, KENJI
分类号 B01J3/00;C23C14/56;C23C16/44;H01L21/02;(IPC1-7):B65D53/00 主分类号 B01J3/00
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