摘要 |
PROBLEM TO BE SOLVED: To obtain a stable uneven image and a lift image without decreasing a scanning speed. SOLUTION: In a scanning probe microscope which has a scanning system of an uneven image observation mode in which a scanning is made with a cantilever approaching a sample to observe an uneven image of the surface of a sample and a lift image observation mode in which a scanning is made with the cantilever lifted up to measure a magnetic moment of the surface of the sample, hysteresis is minimized by utilizing return scan after the observation of an image.
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