发明名称 Electrical connection device for forming and semiconductor device having metal bump electrical connection
摘要 Electrical connection device for forming electrical connection between a first portion and a second portion of a semiconductor device. The first portion is set near or in contact with the second portion. The first and second portions are electrically connected by spraying fine metal particles of gold, nickel or copper in a carrier gas of helium, argon, hydrogen or nitgrogen on the first and second portions to form a metal bump. Prior to spraying the fine metal particles to form the metal bump, hard particles of titanium, copper, hafnium, zirconium or vanadium may be sprayed on the first and second portions to remove contamination layers.
申请公布号 US6331681(B1) 申请公布日期 2001.12.18
申请号 US19940214623 申请日期 1994.03.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 OKUMURA KATSUYA
分类号 H01L21/60;H01L23/485;H01R43/00;H05K3/10;H05K3/14;H05K3/32;(IPC1-7):H05K1/16;H01L23/48;B23K31/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址