发明名称 METHOD FOR MANUFACTURING DETECTOR ARRAY FOR DETECTION OF ELECTROMAGNETIC WAVE, AND DETECTOR ARRAY
摘要 PROBLEM TO BE SOLVED: To provide a simple method for manufacturing a detector array for detecting electromagnetic waves, particularly X rays. SOLUTION: A stack (1) is formed from a sequence of layers which are arranged one above the other in a stacking direction (3) and are connected to one another. In this case, a layer group including at least one sensor layer (9A, 9B,..., 9H) containing a material sensitive to the radioactive rays, and a separating layer are formed repeatedly. The stack (1) is divided to a plurality of slabs (13A, 13B, etc.), so that a row sequence of slabs (13A, 13B, etc.), reproduces the layer sequence of the stack (1). The slab (13A, 13B, etc.) is made to contact optically or electrically on at least one of its flat faces. Rows (14A, 14B,..., 14H) of the slabs (13A, 13B, etc.), which are formed of sensor layers (9A, 9B,..., 9H) form partition walls (21), thereby being divided to individual sensor elements or pixels (A1, A2,..., A6, B1, B2,..., H6). A reflecting material (R) is injected into the partition walls (21).
申请公布号 JP2002202375(A) 申请公布日期 2002.07.19
申请号 JP20010336516 申请日期 2001.11.01
申请人 SIEMENS AG 发明人 OTTO WALTER
分类号 G01T1/20;G01N;G01N23/08;G01T1/24;G01T1/29;H01L27/14;(IPC1-7):G01T1/20 主分类号 G01T1/20
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