发明名称 |
Method for discriminating between holes in and particles on a film covering a substrate |
摘要 |
P-polarized light or having a strong P-polarized component is directed onto a filmed substrate at two (or more) different incidence angles, one angle being relatively large and the other angle being relatively small as measured from a surface normal. Light that is scattered into a back region of the hemispherical space above the substrate surface is collected and the intensity of the collected light is measured for each of the two incident angles. A defect can be classified as either a hole in the film or a particle on the film based on the relative intensities of the collected light.
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申请公布号 |
US6486946(B1) |
申请公布日期 |
2002.11.26 |
申请号 |
US20000594261 |
申请日期 |
2000.06.15 |
申请人 |
ADE CORPORATION |
发明人 |
STOVER JOHN C.;EREMIN YURI A. |
分类号 |
G01N21/84;G01N21/94;G01N21/95;(IPC1-7):G01N21/00;G01N21/83 |
主分类号 |
G01N21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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