| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To make it possible to place and mount a large pellicle stably a flat large pellicle mounting part by providing the flat large pellicle mounting part at a predetermined position in the periphery of the tray of the case for housing the large pellicle. <P>SOLUTION: In the case B to house the large pellicle A, a flat mounting part 9capable of placing the large pellicle A is provided at the predetermined position in the periphery of the tray 6, and a recessed part 10, whose height is lower by≥2 mm than that of the mounting part 9, is provided in the inside face of the mounting part 9. Thus, the large pellicle A can be housed in the case B. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
