摘要 |
PROBLEM TO BE SOLVED: To provide a method by which radiation detection with high spatial resolution is performed using only a single nano belt, a radiation detector having a simple element structure, and a method of producing the radiation detector. SOLUTION: The radiation detector includes a boron nano belt, electrodes attached to both ends of the boron nano belt, and a power supply applying a voltage to the electrodes. The radiation detector is disposed on a part of a semiconductor integrated circuit. The radiation detection method is such that the electrodes are attached to the boron nano belt, to detect radiation by measuring electric resistance variation of the boron nano belt irradiated with radiation. The method of producing the radiation detector comprises dropping of solution in which the boron nano belts are dispersed on a substrate, drying it to form many nano belts, optionally selecting one of the multitude of nano belts, and then forming the fine electrodes and wiring on both ends of the boron nano belt. COPYRIGHT: (C)2008,JPO&INPIT
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