发明名称 THERMAL PROCESSING IN SILICON
摘要 A method is provided for the processing of a device having a crystalline silicon region containing an internal hydrogen source. The method comprises: i) applying encapsulating material to each of the front and rear surfaces of the device to form a lamination; ii) applying pressure to the lamination and heating the lamination to bond the encapsulating material to the device; and iii) cooling the device, where the heating step or cooling step or both are completed under illumination.
申请公布号 US2016172213(A1) 申请公布日期 2016.06.16
申请号 US201514905711 申请日期 2015.07.24
申请人 NEWSOUTH INNOVATIONS PTY LIMITED 发明人 HALLAM Brett Jason;EDWARDS Matthew Bruce;WENHAM Stuart Ross;HAMER Ohillip George;CHAN Catherine Emily;CHONG Chee Mun;LU Pei Hsuan;MAI Ly;SONG Li Hui;SUGIANTO Adeline;MENHAM Alison Maree;XU Guang Qi
分类号 H01L21/322;H01L21/324;H01L21/56;H01L21/225 主分类号 H01L21/322
代理机构 代理人
主权项 1. A method for the processing of a device, having a crystalline silicon region containing an internal hydrogen source, the method comprising i) applying encapsulating material to each of the front and rear surfaces of the device to form a lamination; ii) applying pressure to the lamination and heating the lamination under illumination to bond the encapsulating material to the device.
地址 Sydney, New South Wales 2052 AU