发明名称 METHOD FOR MONITORING OF A BUFFING PROCESS
摘要 A method for the monitoring and/or evaluation of buffing of an alignment layer of a liquid crystal. The method comprises buffing said alignment layer and monitoring said buffing using spectroscopic ellipsometric analysis at at least one location on said alignment layer and at at least one orientation of said alignment layer. Preferably, the monitoring comprises determination of optical anisotropy of the alignment layer.
申请公布号 CA2210739(A1) 申请公布日期 1999.01.17
申请号 CA19972210739 申请日期 1997.07.17
申请人 1294339 ONTARIO, INC. 发明人 BOUEVITCH, OLEG;GLICK, ISSAC
分类号 G01N21/21;(IPC1-7):G01N21/21 主分类号 G01N21/21
代理机构 代理人
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