发明名称 BONDING WIRE FOR SEMICONDUCTOR DEVICE
摘要 There is provided a bonding wire for a semiconductor device including a coating layer having Pd as a main component on a surface of a Cu alloy core material and a skin alloy layer containing Au and Pd on a surface of the coating layer, the bonding wire further improving 2nd bondability on a Pd-plated lead frame and achieving excellent ball bondability even in a high-humidity heating condition. The bonding wire for a semiconductor device including the coating layer having Pd as a main component on the surface of the Cu alloy core material and the skin alloy layer containing Au and Pd on the surface of the coating layer has a Cu concentration of 1 to 10 at% at an outermost surface thereof and has the core material containing either or both of Pd and Pt in a total amount of 0.1 to 3.0% by mass, thereby achieving improvement in the 2nd bondability and excellent ball bondability in the high-humidity heating condition. Furthermore, a maximum concentration of Au in the skin alloy layer is preferably 15 at% to 75 at%.
申请公布号 PH12016501450(A1) 申请公布日期 2016.08.22
申请号 PH12016501450 申请日期 2016.07.22
申请人 NIPPON MICROMETAL CORPORATION;NIPPON STEEL AND SUMIKIN MATERIALS CO., LTD. 发明人 YAMADA, TAKASHI;ODA, DAIZO;OISHI, RYO;UNO, TOMOHIRO
分类号 H01L21/60 主分类号 H01L21/60
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