| 摘要 |
PROBLEM TO BE SOLVED: To improve aligning accuracy of two flat plates such as flat plate-like form plate or a blanket and a work. SOLUTION: Alignment marks 4a, 4b are drawn at a peripheral edge of an upper surface of a form plate 1. Similarly, alignment marks 5a, 5b are drawn at a peripheral edge of an upper surface of a work 2. GPSes 6a, 6b for detecting positions of the marks 4a, 4b and PGSes 7a, 7b for detecting the marks 5a, 5b are disposed above the plate 1. Displacements from target positions of positions of the marks 4a, 4b in an X-Y plane are measured by the GPSes 6a, 6b. Similarly, displacements from target positions of positions of the marks 5a, 5b in the X-Y plane are measured by the GPSes 7a, 7b. An alignment table 3 is driven so that a difference between the displacements of the marks 4a, 4b and the displacements of the marks 5a, 5b fall within a predetermined allowed value to align the work 2 to the plate 1. |
