METHOD AND APPARATUS FOR FORMING SILICA BY COMBUSTION OF LIQUID REACTANTS USING A HEATER

摘要

The present invention is directed to a method for making silica glass and silica glass preforms. A liquid, preferably halide-free, silicon-containing compound capable of being converted by thermal oxidative decomposition to SiO2 is provided and introduced directly into the flame of a combustion burner, which converts the compound to silica, thereby forming finely divided amorphous soot. The soot is vaporized proximate the site where the liquid is converted into silica glass by atomizing the liquid, preferably with a stream of atomizing gas. A heater proximate the burner face and around the burner flame increases soot capture rate and allows for a reduction of the velocity of the atomizing gas. The amorphous soot is deposited on a receptor surface where, either substantially simultaneously with or subsequently to its deposition, the soot is consolidated into a body of fused silica glass.