发明名称 DEVICE FOR EXCITING A GAS BY SURFACE WAVE PLASMA
摘要 <p>The invention concerns a device for exciting a gas comprising a hollow structure (24) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (46, 48) made of dielectric material respectively passing through said structure (24) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.</p>
申请公布号 WO1999004608(A1) 申请公布日期 1999.01.28
申请号 FR1998001453 申请日期 1998.07.07
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址