| 摘要 |
PURPOSE:To measure the approximate position of the tip part of a probe needle automatically, by projecting a laser beam laterally toward the probe needle group of a probe card, detecting the fact that the laser beam is cut with the tip part of the probe needle, and computing the position of the probe needle. CONSTITUTION:With a laser beam 3-1 being shielded, the entire laser beam 3 is rotated by the driving of a thetaZ stage 26 in the direction of theta. At this time, a Y stage 27 is driven at the same time with the theta driving so as to keep the shielded state of the light all the time. This operation is continued until the laser beam 3 is rotated by a specified amount. Thus the approximate position of an upper right probe needle 1 on the laser beam 3-1 is found. A laser beam 3-2 is moved to the vicinity of the approximate position so that the laser beam 3-2 is shielded with the probe needle 1. The position, where the probe needle 1 is judged to be detected, i.e., the intersection of the needle, is used as the center, and the rotation is carried out. Thus the true position of the tip of the upper right needle is detected.
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