| 摘要 |
PURPOSE:To obtain a positive type resist compsn. having superior sensitivity, resolution, heat resistance, shelf stability and a high remaining rate of a film by incorporating quinonediazidosulfonic ester of a vinylphenol compd. and/or an isopropenylphenol compd. as a sensitizer. CONSTITUTION:When a resist compsn. contg. alkali-soluble phenol resin and a sensitizer is produced, ester of a vinylphenol compd. and/or an isopropenylphenol compd. such as vinylphenol, isopropenylphenol, ring-substd. products of the phenols, oligomers or hydrogenated products with a quinonediazidosulfonic acid compd. is used as the sensitizer. This sensitizer can be synthesized by esterifying the vinylphenol compd. and/or the isopropenylphenol compd. with the quinonediazidosulfonic acid compd. A positive type resist compsn. having superior sensitivity, resolution, heat resistance, shelf stability and a high remaining rate of a film can be obtd. |
